Refine
Year of publication
Document Type
- Conference Proceeding (81)
- Article (26)
- Part of a Book (2)
- Book (1)
- Habilitation (1)
Institute
Language
- English (110)
- Multiple languages (1)
Keywords
- Y-branch splitter (11)
- arrayed waveguide gratings (11)
- photonics (8)
- integrated optics (6)
- Arrayed waveguide gratings (5)
- MMI splitter (5)
- OCT (5)
- insertion loss (5)
- AWG (4)
- AWG design (4)
Silicon nanophotonics
(2013)
This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.