Refine
Year of publication
- 2013 (1)
Document Type
- Article (1) (remove)
Institute
Language
- English (1)
Has Fulltext
- no (1)
Is part of the Bibliography
- yes (1) (remove)
Keywords
- AlGaN/GaN HEMT (1)
- Bulk micromachining (1)
- Laser ablation (1)
- SiC MEMS (1)