nein
Refine
Document Type
- Conference Proceeding (3)
- Article (1)
Institute
Language
- English (4)
Has Fulltext
- no (4)
Is part of the Bibliography
- yes (4)
Keywords
- LSMO membrane (1)
- Log-periodic antenna (1)
- Measurement by laser beam (1)
- Microbolometer (1)
- Micromachining (1)
- Micromechanical devices (1)
- Semiconductor device measurement (1)
- Semiconductor lasers (1)
- Terahertz radiation (1)
- Wet etching (1)
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.