Ultrashort pulse laser dicing of thin Si wafers. The influence of laser-induced periodic surface structures on the backside breaking strength
Author: | Matthias Domke, Bernadette Egle, Giovanni Piredda, Sandra StrojORCiD, Gernot Fasching, Marius Bodea, Elisabeth Schwarz |
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DOI: | https://doi.org/10.1088/0960-1317/26/11/115004 |
ISSN: | 0960-1317 |
Parent Title (English): | Journal of Micromechanics and Microengineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
Volume: | 26. Jg. |
Issue: | H. 11 |
Number of pages: | 7 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |
Piredda, Giovanni | |
Stroj, Sandra |