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Microstructuring of resist double layers by a femtosecond laser ablation and UV lithography hybrid process
Author: | Tamara Pacher, Adrian Prinz, Sandra StrojORCiD, Stefan Partel |
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Parent Title (English): | Laser-based Micro- and Nanoprocessing VIII. 4-6 February 2014. San Francisco, California, United States |
Publisher: | SPIE |
Place of publication: | Bellingham, Wash. |
Editor: | Udo Klotzbach, Kunihiko Washio, Craig B. Arnold |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2014 |
Release Date: | 2018/11/22 |
Number of pages: | 8 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Partel, Stefan |
Stroj, Sandra |