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Impact of surface topography and laser pulse duration for laser ablation of solar cell front side passivating SiNx layers
Author: | Sonja Hermann, Tara Dezhdar, Nils-Peter Harder, Rolf Brendel, Michael Seibt, Sandra StrojORCiD |
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DOI: | https://doi.org/10.1063/1.3493204 |
ISSN: | 0021-8979 |
Parent Title (English): | Journal of Applied Physics |
Document Type: | Article |
Language: | English |
Year of publication: | 2010 |
Release Date: | 2020/12/22 |
Tag: | Diodes; High-speed optical techniques; Laser ablation; Passivation; Scanning electron microscopy |
Volume: | 108. Jg. |
Issue: | H. 11 |
Article Number: | 114514 |
Number of pages: | 8 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 500 Naturwissenschaften und Mathematik |
Open Access?: | nein |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Stroj, Sandra |