Minimizing the surface roughness for silicon ablation with ultrashort laser pulses
Author: | Matthias Domke, Giovanni Piredda, Johann ZehetnerORCiD, Sandra StrojORCiD |
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DOI: | https://doi.org/10.2961/jlmn.2016.01.0019 |
Parent Title (English): | JLMN - Journal of Laser Micro/Nanoengineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2016 |
Release Date: | 2018/11/22 |
Volume: | 11. Jg. |
Issue: | H. 1 |
First Page: | 100 |
Last Page: | 103 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Forschung / Josef Ressel Zentrum für Robuste Entscheidungen | |
Forschung / Josef Ressel Zentrum für Materialbearbeitung | |
Publicationlist: | Domke, Matthias |
Piredda, Giovanni | |
Stroj, Sandra | |
Zehetner, Johann |