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Micromachined pressure sensors based on AlGaN/GaN circular HEMT sensing devices. Poster

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Author:Tibor Lalinsky, Peter Hudek, Gabriel Vanko, Pavlina Choleva, Martin Vallo, Milan Drzik, Jaroslav Dzuba, Vladimir Kutis, Ladislav Matay, Ivan Kostic
Parent Title (English):MNE 2011 (Micro- and Nano Engineering Conference), Berlin, Germany, September 19 – 23, 2011
Document Type:Conference Proceeding
Language:English
Year of publication:2011
Release Date:2018/11/22
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik