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Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors

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Author:Johann Zehetner, Stanislav Kraus, Michal Lucki, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky
DOI:https://doi.org/10.1007/s00542-016-2887-2
ISSN:0946-7076
ISSN:1432-1858
Parent Title (English):Microsystem Technologies
Document Type:Article
Language:English
Year of publication:2016
Release Date:2018/11/22
Volume:22. Jg.
Issue:H. 7
First Page:1883
Last Page:1892
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann