Diamond cantilevers for MEMS sensor applications fabricated by laser ablation and optimized etching techniques
- The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
Author: | Johann ZehetnerORCiD, Gabriel Vanko, Tibor Izsak, Eva Kováčová, Milan Drzik, Fadi DohnalORCiD, Alexander Kromka |
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DOI: | https://doi.org/10.1109/ASDAM55965.2022.9966776 |
ISBN: | 978-1-6654-6977-7 |
ISBN: | 978-1-6654-6979-1 |
ISSN: | 2474-9737 |
Parent Title (English): | 2022 14th International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM): Smolenice, Slovakia, 23-26 October 2022 |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2022 |
Release Date: | 2023/03/03 |
Tag: | Measurement by laser beam; Micromechanical devices; Semiconductor device measurement; Semiconductor lasers; Wet etching |
Number of pages: | 4 |
First Page: | 195 |
Last Page: | 198 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 600 Technik, Medizin, angewandte Wissenschaften |
Open Access?: | nein |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Zehetner, Johann |
Dohnal, Fadi |