Recent challenges in micromachining of wide-bandgap materials and fabrication of mems for harsh environments
- The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
Author: | Johann ZehetnerORCiD, Gabriel Vanko, Fadi DohnalORCiD, Tibor Izsák, Milan Drzik, Alexander Kromka |
---|---|
ISBN: | 978-80-554-1884-1 |
Parent Title (English): | Proceeding of the International Conference on Advances in Electronic and Photonic Technologies (ADEPT 2022): Tatranská Lomnica, Slovakia, June 20th-24th, 2022. |
Publisher: | EDIS-Publishing Centre of UZ |
Place of publication: | Žilina |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2022 |
Release Date: | 2023/03/03 |
Tag: | HEMT; MEMS; diamond; harsh environment; laser ablation |
Number of pages: | 6 |
First Page: | 7 |
Last Page: | 12 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 600 Technik, Medizin, angewandte Wissenschaften |
Publicationlist: | Zehetner, Johann |
Dohnal, Fadi |