Optimization of diamond growth on structured, soft and brittle substrates
Author: | Oleg Babcenko, Tibor Izsak, Marian Varga, Katerina Aubrechtova Dragounova, Stepan Potocky, Stepan Stehlik, Gabriel Vanko, Lenka Gajdosova, Stephan Kasemann, Johann ZehetnerORCiD, Alexander Kromka |
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DOI: | https://doi.org/10.1109/ASDAM50306.2020.9393868 |
ISBN: | 978-1-7281-9776-0 |
ISBN: | 978-1-6654-4616-7 |
Parent Title (English): | ASDAM 2020. The 13th International Conference on Advanced Semiconductor Devices and Microsystems. Smolenice Castle, Slovakia. October 11-14, 2020 |
Publisher: | IEEE |
Place of publication: | Piscataway, NJ |
Editor: | Tibor Izsak, Gabriel Vanko |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2020 |
Release Date: | 2022/02/28 |
First Page: | 46 |
Last Page: | 50 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Open Access?: | nein |
Peer review: | wiss. Beitrag, nicht peer-reviewed |
Publicationlist: | Gajdosova, Lenka |
Kasemann, Stephan | |
Zehetner, Johann |