Forschungszentrum Mikrotechnik
Refine
Year of publication
Document Type
- Conference Proceeding (137)
- Article (104)
- Preprint (4)
- Part of a Book (3)
- Doctoral Thesis (2)
- Book (1)
- Habilitation (1)
- Other (1)
Institute
- Forschungszentrum Mikrotechnik (253)
- Josef Ressel Zentrum für Materialbearbeitung (28)
- Forschungszentrum Digital Factory Vorarlberg (7)
- Forschung (6)
- Technik | Engineering & Technology (3)
- Department of Engineering (Ende 2021 aufgelöst; Integration in die übergeordnete OE Technik) (2)
- Forschungszentrum Energie (2)
- Department of Computer Science (Ende 2021 aufgelöst; Integration in die übergeordnete OE Technik) (1)
- Forschungszentrum Human Centred Technologies (1)
- Josef Ressel Zentrum für Robuste Entscheidungen (1)
Language
- English (247)
- German (5)
- Multiple languages (1)
Keywords
- Laser ablation (11)
- Y-branch splitter (11)
- arrayed waveguide gratings (11)
- photonics (8)
- integrated optics (6)
- Arrayed waveguide gratings (5)
- MMI splitter (5)
- OCT (5)
- insertion loss (5)
- AWG (4)
We have investigated the ablation behaviour of single crystal SrTiO3 <100> with focus on the influence of the pulse duration at a wavelength of 248 nm. The experiments were performed with KrF-excimer lasers with pulse durations of 34 ns and 500 fs, respectively. Femtosecond-ablation turns out to be more efficient by one order of magnitude and to eliminate the known problem of cracking of SrTiO3 during laser machining with longer pulses. In addition, the cavities ablated with femtosecond pulses display a smoother surface with no indication of melting and well-defined, sharp edges. These effects can be explained by the reduced thermal shock effect on the material by using ultrashort pulses.
The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
Femtosecond laser ablation on Si generates 2D ripple structures, known as laser induced periodic surface structures (LIPSS) and pinholes. We fabricated membranes with 20 to 50 μm thickness perforated by an array of tapered pinholes up to 5 μm in diameter and 10 to 20 μm spacing. Within several micrometer the pinholes transform into hollow photonic waveguides with constant diameter from 1μm to 2μm. Such structures offer a 3D photonic coupling device for polymer Y-branch- and MMI-splitter. We measured a considerable change of electrical resistivity for 500 ppm H2 in air using Si/SiO2/TiO2 substrates with 2D LIPSS. We propose to investigate 3D waveguide arrays also for photonic-chemical sensors.
By a simple femtosecond laser process, we fabricated metal-oxide/gold composite films for electrical and optical gas sensors. We designed a dripple wavelength AWG-spectrometer, matched to the plasma absorption wavelength region of the composite films. H2/CO absorptions fit well with the AWG design for multi gas detection sensor arrays
Black titanium dioxide in situ generated on femtosecond laser induced periodic surface structures
(2018)
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Oral applications of ultra-short laser pulses - a new approach for gentle and painless treatment?
(2006)
The utilization of lasers in dentistry expands greatly in recent years. For instance, fs-lasers are effective for both drilling and caries prevention, while cw-lasers are useful for adhesive hardening. A cutting-edge application of lasers in dentistry is the debonding of veneers. While there are pre-existing tools for this purpose, there is still potential for improvement. Initial efforts to investigate laser assisted debonding mechanisms with measurements of the optical and mechanical properties of teeth and prosthetic ceramics are presented. Preliminary tests conducted with a laser system used for debonding that is commercially available showed differences in the output power set at the systems console to that at specified distances from the handpiece. Furthermore, the optical properties of the samples (human teeth and ceramics) were characterised. The optical properties of the ceramics should closely resemble those of teeth in terms of look and feel, but they also influence the laser assisted debonding technique and thus must be taken into account. In addition first attempts were performed to investigate the mechanical properties of the samples by means of pump-probe-elastography under a microscope. By analyzing the sample surface up to 20 ns after a fs-laser pulse impact, pressure and shock waves could be detected, which can be utilized to determine the elastic constants of specific materials. Together such investigations are needed to shape the basis for a purely optical approach of debonding of veneers utilizing acoustic waves.
Over the last years, polymers have gained great attention as substrate material, because of the possibility to produce low-cost sensors in a high-throughput manner or for rapid prototyping and the wide variety of polymeric materials available with different features (like transparency, flexibility, stretchability, etc.). For almost all biosensing applications, the interaction between biomolecules (for example, antibodies, proteins or enzymes) and the employed substrate surface is highly important. In order to realize an effective biomolecule immobilization on polymers, different surface activation techniques, including chemical and physical methods, exist. Among them, plasma treatment offers an easy, fast and effective activation of the surfaces by micro/nanotexturing and generating functional groups (including carboxylic acids, amines, esters, aldehydes or hydroxyl groups). Hence, here we present a systematic and comprehensive plasma activation study of various polymeric surfaces by optimizing different parameters, including power, time, substrate temperature and gas composition. Thereby, the highest immobilization efficiency along with a homogenous biomolecule distribution is achieved with a 5-min plasma treatment under a gas composition of 50% oxygen and nitrogen, at a power of 1000 W and a substrate temperature of 80 C. These results are also confirmed by different surface characterization methods, including SEM, XPS and contact angle measurements.
Production and tribological characterization of tailored laser-induced surface 3D microtextures
(2019)
Silicon nanophotonics
(2013)
Investigations on mechanical stability of laser machined optical fibre tips for medical application
(2019)
Light delivery is a challenging task, when it comes to medical applications. The light is guided through optical fibers from the light source towards the treatment region. In case of interstitial light application, the light has to be decoupled from the fibre and spread to the surrounding tissue. To reach larger tissue volumes, this can be either obtained by adding a scattering volume to the tip of the fibre, or by directly modifying the optical fibre itself in order to break the total reflection within the fibre core. Such modifications can be either on the fibre surface itself or internally in the fibre core. One approach to obtain the fibre structuring could be laser induced surface roughening using an ultrafast laser source. While using volume scattering as diffusor at the fibre tip is currently the gold standard for non-thermal applications (< 0.3W/cm), the decoupling of high power laser intensities for thermal treatment options is still challenging. Structuring the fibre core itself usually is related with a loss of mechanical stability. As fibre breakage and potential loss within the human body can have serious consequences, the mechanical stability is one of the quality criterion in diffuser manufacturing. Therefore, investigations about the mechanical stability of laser manufactured optical fibre diffusers are needed.
In order to evaluate the mechanical stability, a 4-point as well as a 2-point breaking test were developed. Different fibre diffusers, based on volume or surface scattering, were manufactured using fs-laser ablation techniques and its breaking strengths were investigated.
It could be shown that for surface fibre modifications, the mechanical stability reduces with increasing defect depth. The stability significantly drops when the laser ablation was performed in the thermal energy range. Volume scattering modified fibres only showed a slight reduction in stability compared to un-machined fibres.
In conclusion, internal fibre modification seems to be the most promising method to establish optical fibre diffusers, which are capable of several watts of emission power, while preserving its mechanical strength.
Ultrafast-laser manufacture of radially emitting optical fiber diffusers for medical applications
(2018)
Interstitial photodynamic therapy (iPDT) treats malignant brain cancer cells by irradiation with low power laser light. The light is guided into the human body by diffuse emitting fibers. This study targets the light distribution of optical diffusers within the brain tissue. It was shown, that by submerging an optical diffuser into human brain phantom, its radiation profile measured in air converges towards a Gaussian distribution with increasing phantom depth. A camera method using digital averaging filters as well as an integrating sphere setup, both, smoothing the diffuser radiation profile were applied onto the evaluated diffuser.
Investigation of non-uniformly emitting optical fiber diffusers on the light distribution in tissue
(2020)
In recent years, ultrashort pulsed lasers have increased their applicability for industrial requirements, as reliable femtosecond and picosecond laser sources with high output power are available on the market. Compared to conventional laser sources, high quality processing of a large number of material classes with different mechanical and optical properties is possible. In the field of laser cutting, these properties enable the cutting of multilayer substrates with changing material properties. In this work, the femtosecond laser cutting of phosphor sheets is demonstrated. The substrate contains a 230 micrometer thick silicone layer filled with phosphor, which is embedded between two glass plates. Due to the softness and thermal sensitivity of the silicone layer in combination with the hard and brittle dielectric material, the separation of such a material combination is challenging for both mechanical separation processes and cutting with conventional laser sources. In our work, we show that the femtosecond laser is suitable to cut the substrate with a high cutting edge quality. In addition to the experimental results of the laser dicing process, we present a universal model that allows predicting the final cutting edge geometry of a multilayer substrate.
In this paper, a 256-channel, 10-GHz arrayed waveguide gratings demultiplexer for ultra-dense wavelength division multiplexing was designed using an in-house developed tool called AWG-Parameters. The AWG demultiplexer was designed for a central wavelength of 1550 nm and the structure was simulated in PHASAR tool from Optiwave. Two different AWG designs were developed and the influence of the design parameters on the AWG performance was studied.
We present 256-channel, 25-GHz AWG designed for ultra-dense wavelength division multiplexing. For the design two in-house developed tools were used: AWG-Parameters tool for the calculation of input design parameters and AWGAnalyser tool, used to evaluate the simulated transmission characteristics. The AWG structure was designed for AWG central wavelength of 1550 nm and simulated with PHASAR tool from Optiwave. To keep the size of AWG structure as small as possible the number of waveguides in the phased array was tested. The simulations show that there is a certain minimum number of phased array waveguides necessary to reach sufficient AWG performance. After optimization, the AWG structure reached 10 cm x 11 cm in size and satisfying optical properties.
Arrayed Waveguide Grating (AWG) is a passive optical component, which have found applications in a wide range of photonic applications including telecommunications and medicine. Silica-on-Silicon (SoS) based AWGs use a low refractive-index contrast between the core (waveguide) and the cladding which leads to some significant advantages such as low propagation losses and low fiber coupling losses between the AWG waveguides and the fibres. Therefore, they are an attractive DWDM solution offering higher channel count technology and good performance characteristics compared to other methods. However, the very low refractive-index contrast means the bending radius of the waveguides needs to be very large (on the order of several millimeters) and may not fall below a particular critical value to suppress bending losses. As a result, silica-based waveguide devices usually have a very large size that limits the integration density of SiO2-based photonic integrated devices. High-index contrast AWGs (such as silicon, silicon nitride or polymer-based waveguide devices) feature much smaller waveguide size compared to low index contrast AWGs. Such compact devices can easily be implemented on a chip and have already found applications in emerging applications such as optical sensors, devices for DNA diagnostics and optical spectrometers for infrared spectroscopy.In this work, we present the design, simulation, technological verification and applications of both, the low-index contrast and high-index contrast AWGs. For telecommunication applications AWG-MUX/Demux with up to 128-channels will be presented. For medical applications the AWG-spectrometer with up to 512-channels will be presented.This work was carried out in the framework of the projects: ADOPT No. SK-AT-20-0012, NOVASiN No. SK-AT-20-0017 and AUTOPIC No. APVV-17-0662 from Slovak research and development agency of Ministry of Education, Science, Research and Sport of the Slovak Republic and No. SK 07/2021 and SK 08/2021 from Austrian Agency for International Cooperation in Education and Research (OeAD-GmbH); and project PASTEL, no. 2020-10-15-001, funded by SAIA.