Forschungszentrum Mikrotechnik
Refine
Document Type
- Conference Proceeding (12) (remove)
Institute
- Josef Ressel Zentrum für Materialbearbeitung (12) (remove)
Language
- English (12)
Has Fulltext
- no (12)
Is part of the Bibliography
- yes (12)
Keywords
- Laser ablation (2)
- AlGaN-GaN (1)
- Aluminum gallium nitride (1)
- Femtosecond phenomena (1)
- GaN-SiC (1)
- Gallium nitride (1)
- HEMT (1)
- III-V semiconductors (1)
- Laser materials processing (1)
- MEMS sensors (1)