Forschungszentrum Mikrotechnik
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- 2022 (24) (remove)
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- Conference Proceeding (15)
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- English (24)
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- photonics (4)
- arrayed waveguide gratings (3)
- 3D MMI splitter (2)
- diamond (2)
- polymers (2)
- 2x2 optical switch (1)
- 3D 1×4 Multimode Interference Splitter (1)
- 3D Y-branch splitter (1)
- 3D optical splitters (1)
- AWG (1)
The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.
Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Deep etched structures in GaAs with high aspect ratio have promising applications in optoelectronics and MEMS devices. The key factors in their fabrication process are the choosing of proper mask material and etching conditions which results in high selectivity and an anisotropic etch profile with smooth sidewalls. In this work, we studied several types of mask materials (Al, Ni, Cr, SiO2) for deep reactive ion etching of GaAs using inductively coupled plasma system. Thus, several sets of experiments were performed with varying gas mixture, pressure and ICP/RF power. As a result, we find optimized conditions and minimal thickness of mask material for achieving deep etched (>140 m) GaAs structures.
The paper deals with the optimization of 2x2 optical switch for photonic integrated circuits based on two 2x2 MMI splitters and two phase-modulators. The optical switch was modelled in the RSoftCAD with the simulation tool BeamPROP. The optimization was done to minimise the insertion losses and broaden the spectral band at 1550 nm by using linear tapers in a 2x2 MMI splitter topology. The 2x2 optical switch is a common element for creating more complex 1xN or NxN optical switches in all-optical signal processing.
Due to the increasing trend of photonic element miniaturisation and the need for optical splitting, we propose and simulate a new type of three-dimensional (3D) optical splitter based on multimode interference (MMI) for the wavelength of 1550 nm. We present various designs and simulations of various parameters for the optimized MMI splitter. We focus on the possibility of its integration on an optical fiber. The design is focused on a possible production process using 3D laser lithography for the prepared experiments. The MMI splitter was prepared by laser lithography using direct writing process and finally investigated by output characterisation by the near-field measurement.
In this work, we investigated the influence of different etch depths of the rib waveguides on the performance of SiN-based AWGs. For this purpose, an 8-channel 100 GHz AWG was designed for a center wavelength of 850 nm. The design parameters entered were calculated using the AWG-Parameters tool. The simulations were performed with a commercial photonic tool PHASAR from Optiwave. The simulated performance was evaluated using the AWG-Analyzer tool. For the AWG design, we used three identical rib waveguides with different etch depths to simulate possible etch imperfection. The simulations show the wavelength shift and degradation of the AWG performance.
Highly-sensitive single-step sensing of levodopa by swellable microneedle-mounted nanogap sensors
(2022)
Microneedle (MN) sensing of biomarkers in interstitial fluid (ISF) can overcome the challenges of self-diagnosis of diseases by a patient, such as blood sampling, handling, and measurement analysis. However, the MN sensing technologies still suffer from poor measurement accuracy due to the small amount of target molecules present in ISF, and require multiple steps of ISF extraction, ISF isolation from MN, and measurement with additional equipment. Here, we present a swellable MN-mounted nanogap sensor that can be inserted into the skin tissue, absorb ISF rapidly, and measure biomarkers in situ by amplifying the measurement signals by redox cycling in nanogap electrodes. We demonstrate that the MN-nanogap sensor measures levodopa (LDA), medication for Parkinson disease, down to 100 nM in an aqueous solution, and 1 μM in both the skin-mimicked gelatin phantom and porcine skin.
Various carbon (nano-) forms, so-called allotropes, have become one of the most supporting activities in fundamental and applied research trends. Therefore, a universal deposition process capable of “adjusting” system parameters in one “deposition chamber” is highly demanding. Here, we present a low-pressure large area deposition system combining radiofrequency (RF) and microwave (MW) plasma in one chamber in different configurations, which offers a wide deposition window for the growth of sp2 carbon (carbon nanotubes, amorphous carbon), a mixture of sp2 and sp3 (diamond-like films) and pure sp3 carbon represented by diamond films. We will show that not only the type of plasma source (RF vs. MW) but also the gas mixture and plasma chemistry are crucial parameters for the controllable and reproducible growth of these allotropes at temperatures from 250 to 800 °C.
Experimental multi-state quantum discrimination in the frequency domain with quantum dot light
(2022)
The quest for the realization of effective quantum state discrimination strategies is of great interest for quantum information technology, as well as for fundamental studies. Therefore, it is crucial to develop new and more efficient methods to implement discrimination protocols for quantum states. Among the others, single photon implementations are more advisable, because of their inherent security advantage in quantum communication scenarios. In this work, we present the experimental realization of a protocol employing a time-multiplexing strategy to optimally discriminate among eight non-orthogonal states, encoded in the four-dimensional Hilbert space spanning both the polarization degree of freedom and photon energy. The experiment, built on a custom-designed bulk optics analyser setup and single photons generated by a nearly deterministic solid-state source, represents a benchmarking example of minimum error discrimination with actual quantum states, requiring only linear optics and two photodetectors to be realized. Our work paves the way for more complex applications and delivers a novel approach towards high-dimensional quantum encoding and decoding operations.
In previous studies of linear rotary systems with active magnetic bearings, parametric excitation was introduced as an open-loop control strategy. The parametric excitation was realized by a periodic, in-phase variation of the bearing stiffness. At the difference between two of the eigenfrequencies of the system, a stabilizing effect, called anti-resonance, was found numerically and validated in experiments. In this work, preliminary results of further exploration of the parametric excitation are shared. A Jeffcott rotor with two active magnetic bearings and a disk is investigated. Using Floquet theory, a deeper insight into the dynamic behavior of the system is obtained. Aiming at a further increase of stability, a phase difference between excitation terms is introduced.