Forschungszentrum Mikrotechnik
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This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.
The photonic integrated circuits are required in the next generations of coherent terabit optical communications. The software tools for automated adjustment and coupling of optical fiber arrays to photonic integrated circuits has been developed. The obtained results are needed in final production phase in the technology process of photonic integrated circuits packaging.
The production of liquid-gas dispersions places high demands on the process technology, which requires knowledge of the bubble formation mechanisms, as well as the phase parameters of the media combinations used. To obtain the bubble sizes introduced to a flow not knowing the phase parameters, different process parameters are investigated. Their quality and applicability are evaluated. The results obtained make it possible to simplify long design processes of dispersion processes in manufacturing plants and to ensure the product quality of the products manufactured, by reducing waste.
The production of liquid-gas mixtures with desired properties still places high demands on process technology and is usually realized in bubble columns. The physical calculation models used have individual dimensionless factors which, depending on the application, are only valid for small ranges consisting of flow velocity, nozzle geometry and test setup. An iterative but time-consuming design of such dispersion processes is used in industry for producing a liquid-gas mixture according to desired requirements. In the present investigation, we accelerate the necessary design loops by setting up a physical model, which consists of several subsystems that are enriched by dedicated experiments to realize liquid-gas dispersions with low volume fraction and small air bubble diameters in oil. Our approach allows the extraction of individual dimensionless factors from maps of the introduced subsystems. These maps allow for targeted corrective measures of a production process for keeping the quality. The calculation-based approach avoids the need for performing iterative design loops. Overall, this approach supports the controlled generation of liquid-gas mixtures.
We present a new concept of 3D polymer-based 1 × 4 beam splitter for wavelength splitting around 1550 nm. The beam splitter consists of IP-Dip polymer as a core and polydimethylsiloxane (PDMS) Sylgard 184 as a cladding. The splitter was designed and simulated with two different photonics tools and the results show high splitting ratio for single-mode and multi-mode operation with low losses. Based on the simulations, a 3D beam splitter was designed and realized using direct laser writing (DLW) process with adaptation to coupling to standard single-mode fiber. With respect to the technological limits, the multi-mode splitter having core of (4 × 4) μm 2 was designed and fabricated together with supporting stable mechanical construction. Splitting properties were investigated by intensity monitoring of splitter outputs using optical microscopy and near-field scanning optical microscopy. In the development phase, the optical performance of fabricated beam splitter was examined by splitting of short visible wavelengths using red light emitting diode. Finally, the splitting of 1550 nm laser light was studied in detail by near-field measurements and compared with the simulated results. The nearly single-mode operation was observed and the shape of propagating mode and mode field diameter was well recognized.