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Micro structuring of membranes for sensor devices on different nulk materials by femtosecond laser ablation

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Author:Johann Zehetner, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky, Michal Lucki, Stanislav Kraus
Parent Title (English):Proceedings of ADEPT. 4th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 20 - 23, 2016
Publisher:University of Zilina
Place of publication:Zilina
Editor:Jaroslav Kovac, Miroslav Michalka, Sona Kovacova, Daniel Jandura
Document Type:Conference Proceeding
Year of publication:2016
Release Date:2018/11/22
First Page:55
Last Page:58
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
Publicationlist:Zehetner, Johann