Design and simulation of Si/SiO2/SiN waveguides structure
Author: | Jozef Chovan, Frantisek Uherek, Daniel Figura, Dana SeyringerORCiD, Lenka Gajdosova |
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Parent Title (English): | Proceedings of ADEPT. 6th International Conference on Advances in Electronic and Photonic Technologies. Tatranska Lomnica, High Tatras, Slovakia. June 18 - 21, 2018 |
Publisher: | Institute of Electriconics and Photonics, FEI STU |
Place of publication: | Bratislava |
Editor: | Juraj Nevrela, Michal Micjan, Miroslav Novota, Jaroslav Kovac |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2018 |
Release Date: | 2019/07/09 |
First Page: | 160 |
Last Page: | 163 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
Publicationlist: | Gajdosova, Lenka |
Seyringer, Dana |