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Micro-machining of PMN-PT crystals with ultrashort laser pulses

  • Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.

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Metadaten
Author:Giovanni Piredda, Sandra Stroj, Dorian Ziss, Julian Stangl, Rinaldo Trotta, Javier Martin-Sanchez, Armando Rastelli
DOI:https://doi.org/10.1007/s00339-019-2460-9
Parent Title (English):Applied Physics A
Document Type:Article
Language:English
Year of publication:2019
Release Date:2020/01/28
Volume:125. Jg.
Issue:H. 3/201
Number og pages:11
Organisationseinheit:Forschung / Forschungszentrum Mikrotechnik
DDC classes:600 Technik, Medizin, angewandte Wissenschaften
Open Access?:ja
Peer review:wiss. Beitrag, peer-reviewed
Publicationlist:Piredda, Giovanni
Stroj, Sandra
Bibliographie 2019
Licence (German):License LogoCreative Commons - CC BY - International - Attribution- Namensnennung 4.0