Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure
- This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.
Author: | Ivan Hotovy, Johann Zehetner, Vlastimil Rehacek, Miroslav Mikolasek, Stanislava Serecunova, Dana Seyringer, Fadi Dohnal |
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DOI: | https://doi.org/10.2478/jee-2024-0004 |
Parent Title (English): | Journal of Electrical Engineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2024 |
Release Date: | 2024/02/28 |
Tag: | gas sensing; laser ablation; sensor |
Volume: | 75 |
Issue: | 1 |
Number of pages: | 5 |
First Page: | 24 |
Last Page: | 28 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 600 Technik, Medizin, angewandte Wissenschaften |
JEL-Classification: | Z Other Special Topics |
Open Access?: | ja |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Seyringer, Dana |
Zehetner, Johann | |
Dohnal, Fadi | |
Licence (German): | Creative Commons - CC BY - NC - ND - 4.0 International - Attribution - NonCommercial –NoDerivs - Namensnennung - Nicht kommerziell - Keine Bearbeitungen |