Preparation of laser induced periodic surface structures (LIPSS) and their transfer into sensing elements
- Semiconducting metal oxides are widely used for solar cells, poto-catalysis, bio-active materials and gas sensors. Besides the material properties of the used semiconductor,the specific surface topology of the sensor determines the device performance. We investigate the preparation and transfer suitable metals onto LIPPS structures on glass for gas sensing applications.
Author: | Johann ZehetnerORCiD, Ivan Hotovy, P. Ondrejka, Vlastimil Rehacek, I. Kostic, Miroslav Mikolasek, Dana SeyringerORCiD, Fadi DohnalORCiD |
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ISBN: | 978-80-223-5494-3 |
Parent Title (English): | Proceedings of 12th Solid State Surfaces and Interfaces: Smolenice, Slovak Republic, November 21-23, 2022. |
Publisher: | Comenius University Bratislava |
Place of publication: | Bratislava |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2022 |
Release Date: | 2023/03/03 |
Tag: | LIPPS |
Number of pages: | 2 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 600 Technik, Medizin, angewandte Wissenschaften |
Publicationlist: | Seyringer, Dana |
Zehetner, Johann | |
Dohnal, Fadi |