Laser micro machining of 3C-SiC single crystals
Author: | Sandra Zoppel, Maria Farsari, Robert Merz, Johann ZehetnerORCiD, Günther Stangl, Georg A. Reider, Costas Fotakis |
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DOI: | https://doi.org/10.1016/j.mee.2006.01.064 |
Parent Title (English): | Microelectronic Engineering |
Document Type: | Article |
Language: | English |
Year of publication: | 2006 |
Release Date: | 2020/12/21 |
Tag: | Distributed feedback lasers; Dye lasers; Excimer lasers; Laser ablation; Laser beam machining |
Volume: | 83. Jg. |
Issue: | H. 4-9: Micro- and Nano-Engineering MNE 2005. Vienna, Austria. 19-22 September 2005 |
First Page: | 1400 |
Last Page: | 1402 |
Organisationseinheit: | Forschung / Forschungszentrum Mikrotechnik |
DDC classes: | 500 Naturwissenschaften und Mathematik / 530 Physik |
Open Access?: | nein |
Peer review: | wiss. Beitrag, peer-reviewed |
Publicationlist: | Stroj, Sandra |
Zehetner, Johann | |
Merz, Robert |