Open Access

The properties of diamond make it an attractive material for MEMS and sensor devices. We present the feasibility to fabricate membranes and cantilevers made of nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates using microwave chemical vapour deposition (MWCVD). The patterning of micromechanical structures was performed by a combined process of femtosecond laser ablation and wet etching. We designed cantilever structures with varying lengths and widths (25, 50, 100, 200 and 300 μm). The cantilevers were made in a symmetric left- and right-hand configuration. An additional laser treatment was used to modify the mechanical properties of the left-hand cantilever. The deflection of the laser-treated, and non-treated sections was measured. The global mechanical system properties were simulated and corresponded with high accuracy to the measured results of deflection.

In this paper we present various educational activities with Photonics Explorer, an educational kit developed by the photonics research team B - PHOT at VUB (Vrije Universiteit Brussel) for students at secondary schools. The concept is a ‘lab-in-a-box’ that enables students of the 2 nd and 3 rd grade to do photonics experiments themselves at school with lasers, LEDs, lenses, optical fibers, and other high-tech components. Even though, the kit was developed for the secondary schools, we use experiments from the kit also for some other teaching activities such as lectures at the university, photonics workshops for teachers and children at primary/secondary schools or for events such as children's/youth's university or the night of sciences. In the frame of Austrian based project Phorsch! we have organized most of these activities which will be presented here.

The paper shows concepts of optical splitting based on three dimensional (3D) optical splitters based on multimode interference principle. This paper is focused on the design, fabrication and characterization of 3D MMI splitter with formed output waveguides based on IP-Dip polymer for direct application on optical fiber. The MMI optical splitter was simulated and fabricated using direct laser writing process. Output characteristics were characterized by highly resolved near-field scanning optical microscope (NSOM) and compared with 3D MMI splitter without output waveguides.

The paper deals with the optimization of 2x2 optical switch for photonic integrated circuits based on two 2x2 MMI splitters and two phase-modulators. The optical switch was modelled in the RSoftCAD with the simulation tool BeamPROP. The optimization was done to minimise the insertion losses and broaden the spectral band at 1550 nm by using linear tapers in a 2x2 MMI splitter topology. The 2x2 optical switch is a common element for creating more complex 1xN or NxN optical switches in all-optical signal processing.

Microneedle (MN) sensing of biomarkers in interstitial fluid (ISF) can overcome the challenges of self-diagnosis of diseases by a patient, such as blood sampling, handling, and measurement analysis. However, the MN sensing technologies still suffer from poor measurement accuracy due to the small amount of target molecules present in ISF, and require multiple steps of ISF extraction, ISF isolation from MN, and measurement with additional equipment. Here, we present a swellable MN-mounted nanogap sensor that can be inserted into the skin tissue, absorb ISF rapidly, and measure biomarkers in situ by amplifying the measurement signals by redox cycling in nanogap electrodes. We demonstrate that the MN-nanogap sensor measures levodopa (LDA), medication for Parkinson disease, down to 100 nM in an aqueous solution, and 1 μM in both the skin-mimicked gelatin phantom and porcine skin.

Due to the increasing trend of photonic element miniaturisation and the need for optical splitting, we propose and simulate a new type of three-dimensional (3D) optical splitter based on multimode interference (MMI) for the wavelength of 1550 nm. We present various designs and simulations of various parameters for the optimized MMI splitter. We focus on the possibility of its integration on an optical fiber. The design is focused on a possible production process using 3D laser lithography for the prepared experiments. The MMI splitter was prepared by laser lithography using direct writing process and finally investigated by output characterisation by the near-field measurement.

This paper describes two different designs of 1×8 passive optical splitters. The first splitter consists of cascade arranged directional waveguide branches (Y-branch splitter) with (0.8×0.16) µm2 waveguide cross-section. The second splitter is based on multimode interference occurring in a large MMI coupler, which uses a self-imaging effect for beam propagation, exhibiting the same waveguide core size as a Y-branch splitter. The waveguide channel profile, used in both approaches, is based on a silicon nitride material platform, with a refractive index of core being nc = 1.925 and a refractive index of cladding ncl = 1.4575. The splitters are designed as a planar structure for a medical operating wavelength 850 nm. Design, simulation, and optimization of passive optical components are performed by a commercial photonic software tool BeamPROP simulation engine by RSoft Photonics Suite tool, employing beam propagation method. This work aims to find the minimum physical dimensions of the designed splitters with the satisfactory optical performance. According to the minimum insertion loss and minimum non-uniformity, the optimum length of the splitters is determined. Finally, the optical properties of splitters for both approaches are discussed and compared with each other.

The properties of SiC and diamond make them attractive materials for MEMS and sensor devices. We innovated specific laser ablation techniques to fabricate membranes and cantilevers made of SiC or nano-(micro-) crystalline diamond films grown on Si/SiO2 substrates by microwave chemical vapour deposition (MWCVD). We started research to generate surface moulds to grow corrugated diamond films for membranes and cantilevers. A software tool was developed to support the design of micromechanical cantilevers. We can measure deformation and resonant frequency of diamond cantilevers and identify the global mechanical properties. A benchmark against finite element simulations enables an inverse identification of the specific system parameters and simplifies the characterization procedure.

This paper aims to study the design, simulation, and optimization of low-loss Y-branch passive optical splitters up to 64 output ports for telecommunication applications. For a waveguide channel profile, the standard material silica-on-silicon is used. The Y-splitters are designed and simulated at telecommunication operating wavelength, λ = 1550 nm. Except for the lengths of the used Y-branches, and a core size of the waveguides, design parameters such as port pitch between the waveguides and simulation parameters for all splitters are considered fixed. The simulation results are analyzed to determine the optimum length of the splitters and the optimum core size. Based on this optimization the total length of the highest designed 1×64 Y-branch splitter was reduced by 41.14 % for a waveguide core (5×5) μm2 compared to the length of splitter with a standard (6×6) μm2 core size.

In this paper, we document optical splitters based on Y-branch and also on MMI splitting principle. The 1×4 Y-branch splitter was prepared in 3D geometry fully from polymer approaching the single mode transmission at 1550 nm. We also prepared new concept of 1×4 MMI optical splitter. Their optical properties and character of output optical field were measured by near-field scanning optical microscope. Splitting properties and optical outputs of both splitters are very promising and increase an attractiveness of presented 3D technology and polymers.

In this paper, low-loss Y-branch splitters up to 128 splitting ratio are designed, simulated, and optimized by using 2D beam propagation method in OptiBPM tool by Optiwave. For an optical waveguide, a silica-on-silicon material platform is used. The splitters were designed as a planar structure for a telecommunication operating wavelength of 1.55 m. According to the minimum insertion loss and minimum non-uniformity, the optimum length for each Y-branch is determined. The influence of the pre-defined S-Bend waveguide shapes (Arc, Cosine, Sine) and of the waveguide core size reduction on the splitter performance has been also studied. The obtained simulation results of all designed splitters with different S-Bend shape waveguides together with the different waveguide core sizes are discussed and compared with each other.

Entangled photon generation at 1550 nm in the telecom C-band is of critical importance as it enables the realization of quantum communication protocols over long distance using deployed telecommunication infrastructure. InAs epitaxial quantum dots have recently enabled on-demand generation of entangled photons in this wavelength range. However, time-dependent state evolution, caused by the fine-structure splitting, currently limits the fidelity to a specific entangled state. Here, we show fine-structure suppression for InAs quantum dots using micromachined piezoelectric actuators and demonstrate generation of highly entangled photons at 1550 nm. At the lowest fine-structure setting, we obtain a maximum fidelity of 90.0 ± 2.7% (concurrence of 87.5 ± 3.1%). The concurrence remains high also for moderate (weak) temporal filtering, with values close to 80% (50%), corresponding to 30% (80%) of collected photons, respectively. The presented fine-structure control opens the way for exploiting entangled photons from quantum dots in fiber-based quantum communication protocols.

Recently the use of microRNAs (miRNAs) as biomarkers for a multitude of diseases has gained substantial significance for clinical as well as point-of-care diagnostics. Amongst other challenges, however, it holds the central requirement that the concentration of a given miRNA must be evaluated within the context of other factors in order to unambiguously diagnose one specific disease. In terms of the development of diagnostic methods and devices, this implies an inevitable demand for multiplexing in order to be able to gauge the abundance of several components of interest in a patient’s sample in parallel. In this study, we design and implement different multiplexed versions of our electrochemical microfluidic biosensor by dividing its channel into subsections, creating four novel chip designs for the amplification-free and simultaneous quantification of up to eight miRNAs on the CRISPR-Biosensor X (‘X’ highlighting the multiplexing aspect of the device). We then use a one-step model assay followed by amperometric readout in combination with a 2-minute-stop-flow-protocol to explore the fluidic and mechanical characteristics and limitations of the different versions of the device. The sensor showing the best performance, is subsequently used for the Cas13a-powered proof-of-concept measurement of two miRNAs (miRNA-19b and miRNA-20a) from the miRNA-17∼92 cluster, which is dysregulated in the blood of pediatric medulloblastoma patients. Quantification of the latter, alongside simultaneous negative control measurements are accomplished on the same device. We thereby confirm the applicability of our platform to the challenge of amplification-free, parallel detection of multiple nucleic acids.

In this paper, design of 1×8 multimode interference passive optical splitter is proposed. The structure of the splitter is designed based on a silicon nitride material platform. This work aims to find the minimum physical dimensions of the designed splitters with the satisfactory optical performance. According to the minimum insertion loss and minimum non-uniformity, the optimum length of the splitters is determined.

A Telecom optical fibers are still being the best transmission medium of digital data and analogue signals for long distance applications. Progress in integrated photonics enables development of photonic chips with new unique properties, circuits of the future, and overcomes current limits in information and communication technologies. The packaging of photonic chips is necessary for taking them out of research laboratories into real implementation in the information and communication technology applications. One important step of packaging is effective coupling of optical radiation between telecom optical fiber with ten microns core dimension and photonic chip optical waveguide with submicron dimensions. For complex photonic chips, it is necessary to couple not one optical fiber but several optical fibers, which are arranged in fiber arrays. In this case, it is necessary to use a 6D positioning system, which allows to optimally adjust the relative position of the photonic chip and the fiber arrays. After setting the optimal relative position of the photonic chip and the fiber array, the process of their fixation follows. One possibility of fixation is gluing with an adhesive in the optical path between the photonic chip and an array of optical fibers with a refractive index close to the refractive index of the optical fiber core. This paper is focused on the experimental test set-up for the temperature characterization of fiber array to photonics chip butt coupling at 1310 nm and 1550 nm wavelengths fixed themselves by UV adhesive in the optical path. The main aims of this works are selection of better adhesive from two types for gluing of photonic chip and fiber array in packaging process of photonics chips and validation of gluing process developing. The coupling and alignment of fiber arrays to photonics chip were done by automated active alignments system and they were fixed themselves by curable epoxy adhesive. Temperature changes of coupling insertion losses are measured and investigated for two different UV adhesives during three temperature cycles from -40 °C to 80 °C in climatic chamber according to Telcordia. Spectral dependence of insertion losses were measured and compared before and after three temperature cycles for 1530 nm to 1570 nm spectral range at room temperature. This work was supported by the Slovak Research and Development Agency under the contracts APVV-17-0662 and SK-AT-20-0017 and by the COST Action “European Network for High Performance Integrated Microwave Photonics” (EUIMWP) CA16220.

Femtosecond laser ablation on Si generates 2D ripple structures, known as laser induced periodic surface structures (LIPSS) and pinholes. We fabricated membranes with 20 to 50 μm thickness perforated by an array of tapered pinholes up to 5 μm in diameter and 10 to 20 μm spacing. Within several micrometer the pinholes transform into hollow photonic waveguides with constant diameter from 1μm to 2μm. Such structures offer a 3D photonic coupling device for polymer Y-branch- and MMI-splitter. We measured a considerable change of electrical resistivity for 500 ppm H2 in air using Si/SiO2/TiO2 substrates with 2D LIPSS. We propose to investigate 3D waveguide arrays also for photonic-chemical sensors.

This paper presents the design, simulation, and optimization of a 1×128 multimode interference (MMI) splitter with a silica-on-silicon channel profile. This work aims to study the influence of the different S-Bend output waveguide shapes at the end of the MMI coupler on the final optical properties. The 1×128 MMI splitters have been simulated using beam propagation method in OptiBPM software. The optical properties of all considered splitters with different shapes of outputs waveguides are discussed and compared with each other. Based on the minimum insertion loss and non-uniformity, the final shape of output waveguides, ensuring the lowest losses, is determined.

Electric cell-substrate impedance spectroscopy (ECIS) enables non-invasive and continuous read-out of electrical parameters of living tissue. The aim of the current study was to investigate the performance of interdigitated sensors with 50 μm electrode width and 50 μm inter-electrode distance made of gold, aluminium, and titanium for monitoring the barrier properties of epithelial cells in tissue culture. At first, the measurement performance of the photolithographic fabricated sensors was characterized by defined reference electrolytes. The sensors were used to monitor the electrical properties of two adherent epithelial barrier tissue models: renal proximal tubular LLC-PK1 cells, representing a normal functional transporting epithelium, and human cervical cancer-derived HeLa cells, forming non-transporting cancerous epithelial tissue. Then, the impedance spectra obtained were analysed by numerically fitting the parameters of the two different models to the measured impedance spectrum. Aluminium sensors proved to be as sensitive and consistent in repeated online-recordings for continuous cell growth and differentiation monitoring assensors made of gold, the standard electrode material. Titanium electrodes exhibited an elevated intrinsic ohmic resistance incomparison to gold reflecting its lower electric conductivity. Analysis of impedance spectra through applying models and numerical data fitting enabled the detailed investigation of the development and properties of a functional transporting epithelial tissue using either gold or aluminium sensors. The result of the data obtained, supports the consideration of aluminium and titanium sensor materials as potential alternatives to gold sensors for advanced application of ECIS spectroscopy.

We present design and simulation of 16-channel, 100-GHz silicon nitride based AWG using BeamPROP simulation engine of RSoft photonic tool. The AWG was designed for TM-polarized light with central wavelength of 850 nm. The input design parameters were calculated applying AWG-Parameters tool. For this purpose, we created a ridge waveguide structure, used in the design of the AWG layout, and performed FEM simulation. The output of the BPM simulation of AWG structure are the transmission characteristics, which was used to calculate transmission parameters defining optical properties of simulated AWG. The achieved simulation results are in a good agreement with the design.

Over the last years, polymers have gained great attention as substrate material, because of the possibility to produce low-cost sensors in a high-throughput manner or for rapid prototyping and the wide variety of polymeric materials available with different features (like transparency, flexibility, stretchability, etc.). For almost all biosensing applications, the interaction between biomolecules (for example, antibodies, proteins or enzymes) and the employed substrate surface is highly important. In order to realize an effective biomolecule immobilization on polymers, different surface activation techniques, including chemical and physical methods, exist. Among them, plasma treatment offers an easy, fast and effective activation of the surfaces by micro/nanotexturing and generating functional groups (including carboxylic acids, amines, esters, aldehydes or hydroxyl groups). Hence, here we present a systematic and comprehensive plasma activation study of various polymeric surfaces by optimizing different parameters, including power, time, substrate temperature and gas composition. Thereby, the highest immobilization efficiency along with a homogenous biomolecule distribution is achieved with a 5-min plasma treatment under a gas composition of 50% oxygen and nitrogen, at a power of 1000 W and a substrate temperature of 80 C. These results are also confirmed by different surface characterization methods, including SEM, XPS and contact angle measurements.

Lead–magnesium niobate lead titanate (PMN-PT) has been proven as an excellent material for sensing and actuating applications. The fabrication of advanced ultra-small PMN-PT-based devices relies on the availability of sophisticated procedures for the micro-machining of PMN-PT thin films or bulk substrates. Approaches reported up to date include chemical etching, excimer laser ablation, and ion milling. To ensure an excellent device performance, a key mandatory feature for a micro-machining process is to preserve as far as possible the crystalline quality of the substrates; in other words, the fabrication method must induce a low density of cracks and other kind of defects. In this work, we demonstrate a relatively fast procedure for the fabrication of high-quality PMN-PT micro-machined actuators employing green femtosecond laser pulses. The fabricated devices feature the absence of extended cracks and well-defined edges with relatively low roughness, which is advantageous for the further integration of nanomaterials onto the piezoelectric actuators.

The photonic integrated circuits are required in the next generations of coherent terabit optical communications. The software tools for automated adjustment and coupling of optical fiber arrays to photonic integrated circuits has been developed. The obtained results are needed in final production phase in the technology process of photonic integrated circuits packaging.

We report resent results on the fabrication and characterization of carbon nanogap interdigitated electrode arrays (IDAs) for biosensor applications based on redox cycling. The electrochemical results of the carbon electrodes are compared to our fabricated gold electrodes with similar nanogap distances. The amplification factor and the collection efficiency were recorded by chronoamperometry. Cyclic voltammetry (CV) was utilized to determine the oxidation and reduction potentials as well as for monitoring the electron transfer process. The different deposited carbon materials were characterized by Raman spectroscopy.At present, we successfully fabricated carbon nanogaps down to 80 nm and we are convinced to reach the present fabrication limit of about 30 nm (for gold and platinum electrodes) with carbon as electrode material as well. To the best of our knowledge, this is the first IDA nanogap sensor, which features a gap distance under 100 nm with amorphous carbon as electrode material. Moreover, we present a signal amplification of 32 for carbon electrodes by redox cycling, which is the highest reported amplification so far.

Optical splitters are passive optical components, which have found applications in a wide range of telecom, sensing, medical and many other scientific areas. Low-index contrast optical splitters (Silica-on-Silicon (SoS) based waveguide devices) feature many advantages such as low fiber coupling losses and low propagation losses. They are considered an attractive DWDM solution in the telecommunication for all optical signal processing in optical communication systems. Nowadays the steadily increasing data volume in communication networks is driven by a rapid proliferation of home-based and business computers, storage capacities, processing capabilities and the extensive availability of Internet. The challenge is to transfer high data volumes in short periods of time over high distances as lossless as possible. The task of the optical splitters in Fiber-to-the-x (FTTx) network is to split one optical signal in many identical signals bringing for example the same TV signal in different households. Of course, the more buildings can be served by one optical splitter the lower are the installation costs. High-index contrast optical splitters (such as silicon, silicon nitride or polymer based waveguide devices) feature much smaller waveguide size compared to low index contrast splitters. Such compact devices can easily be implemented on-chip and have already been used in the development of optical sensors, devices for DNA diagnostics and for infrared spectroscopy. We will present the latest achievements in the design of two mostly used optical splitters (MMI and Y-branch) and discuss their advantages and disadvantages. Finally, some applications of the splitters developed in the frame of various projects will be presented. This work was carried out in the framework of the project PHOCOP (no. SK-AT-2017-0013) and NAMOPRISIN (no. SK-AT-2017-0005) from the Slovak research and development agency of the Ministry of Education, Science, Research and Sport of the Slovak Republic and SK 16/2018 and 15/2018 from OeAD-GmbH.

SiN is a suitable material for fabricating of photonic integrated circuits with middle refractive index contrast for the visible and near infrared spectral region with ultra-low propagation losses. The paper deals with the design and simulation of fiber to SiN chip butt coupler with single step fabrication process without thickness tapering. Coupler is designed for 850 nm band for coupling between strip 0.25 μm × 1.00 μm waveguide and Nufern's 780-OCT single mode optical fiber with core diameter 4.4 μm. The coupling losses simulation results of the two simulation methods finite-difference beam propagation techniques and eigenmode expansion method are compared.

Interstitial photodynamic therapy (iPDT) treats malignant brain cancer cells by irradiation with low power laser light. The light is guided into the human body by diffuse emitting fibers. This study targets the light distribution of optical diffusers within the brain tissue. It was shown, that by submerging an optical diffuser into human brain phantom, its radiation profile measured in air converges towards a Gaussian distribution with increasing phantom depth. A camera method using digital averaging filters as well as an integrating sphere setup, both, smoothing the diffuser radiation profile were applied onto the evaluated diffuser.